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Nanocluster Characterization by EXAFS Spectroscopy

✍ Scribed by Faraci G.

Book ID
127403740
Publisher
American Scientific Publishers
Year
2004
Tongue
English
Weight
554 KB
Category
Library
ISBN-13
9781588830623

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We report on the modification of the local coordination of Cu in TiN-Cu films, as a function of the growth conditions. The films were deposited on Si (100) by pulsed laser deposition using either an intermetallic TiCu target or elemental Ti and Cu targets. During growth the partial nitrogen pressure