Nano positioning control for dual stage using minimum order observer

✍ Scribed by Hong Gun Kim

• Book ID: 113099724
• Publisher: Springer-Verlag
• Year: 2012
• Tongue: English
• Weight: 697 KB
• Volume: 26
• Category: Article
• ISSN: 1738-494X
• DOI: 10.1007/s12206-011-1252-8