✦ LIBER ✦
Nano-island fabrication by electron beam lithography and selective oxidation of Al-rich AlGaAs layers for single electron device application
✍ Scribed by M. De Vittorio; M.T. Todaro; V. Vitale; A. Passaseo; T.K. Johal; R. Rinaldi; R. Cingolani; S. Bernardi
- Book ID
- 114155469
- Publisher
- Elsevier Science
- Year
- 2002
- Tongue
- English
- Weight
- 482 KB
- Volume
- 61-62
- Category
- Article
- ISSN
- 0167-9317
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