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Nano-clusters structure and magnetic properties of high fluence Mn+ ion-implanted GaN

✍ Scribed by Di Chen; Zhibo Ding; Shude Yao; Wei Hua; Kun Wang; Tianxiang Chen


Book ID
108224259
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
551 KB
Volume
266
Category
Article
ISSN
0168-583X

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## Abstract Dilute magnetic nonpolar GaN films have been fabricated by implanting Mn into unintentionally doped nonpolar __a__ ‐plane GaN films at room temperature, and a subsequent rapid thermal annealing. The X‐ray diffraction analysis shows that after rapid thermal annealing the peak of the GaN