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n+-Polysilicon Etching in CCl[sub 4]∕He Discharges: Characterization and Modeling

✍ Scribed by Gogolides, Evangelos

Book ID
118049907
Publisher
The Electrochemical Society
Year
1989
Tongue
English
Weight
935 KB
Volume
136
Category
Article
ISSN
0013-4651

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