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N-bromohexamethyldisilazane: Investigation of properties and thermodynamic simulation of precipitation of thin-layer structures from the vapor phase

✍ Scribed by V. I. Rakhlin; L. D. Nikulina; S. V. Sysoev; L. I. Chernyavskii; M. L. Kosinova; A. A. Titov; T. A. Podgorbunskaya; M. G. Voronkov

Book ID: 111468200
Publisher: SP MAIK Nauka/Interperiodica
Year: 2011
Tongue: English
Weight: 168 KB
Volume: 37
Category: Article
ISSN: 1087-6596
DOI: 10.1134/s1087659611010123

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