✦ LIBER ✦
N and p-type doping of PECVD a-SiC:H obtained under “silane starving plasma” condition with and without hydrogen dilution
✍ Scribed by A.R. Oliveira; M.N.P. Carreño
- Book ID
- 108215297
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 273 KB
- Volume
- 128
- Category
- Article
- ISSN
- 0921-5107
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