✦ LIBER ✦
Multivariable Optimal Learning Control of Wafer Temperatures in a Commercial RTP Equipment
✍ Scribed by Moon K. Cho; Sang R. Joo; Seung H. Won; Kwang S. Lee
- Publisher
- John Wiley and Sons
- Year
- 2008
- Tongue
- English
- Weight
- 857 KB
- Volume
- 83
- Category
- Article
- ISSN
- 0008-4034
No coin nor oath required. For personal study only.