Multispecies Particle Simulation of the Hydrogen Plasma Sheath Region

✍ Scribed by S. Longo; P. Diomede; M. Capitelli

• Publisher: John Wiley and Sons
• Year: 2006
• Tongue: English
• Weight: 212 KB
• Volume: 46
• Category: Article
• ISSN: 0005-8025
• DOI: 10.1002/ctpp.200610075

✦ Synopsis

A multispecies 1.5D PIC/MC model developed by our group is applied to plasma surface interaction. The model includes special variance reduction techniques for minority species and a modified null collision Monte Carlo method which gives the exact statistics of collision times also when including self-consistent fields. The model is applied to two test cases: capacitively coupled radio frequency discharge and plasma injection close to an absorbing wall. We discuss the kinetics of charged particles, the non equilibrium electron energy distribution function (eedf) and vibrational distribution function (vdf), the role of the gas temperature and the difficulties arising from the different time scales involved.