Multipurpose implanter for high technology development

✍ Scribed by I. A. Ivanova; V. T. Astrelin; A. V. Burdakov; R. V. Voskoboynikov; A. I. Gorbovskii; A. A. Ivanov; V. A. Kapitonov; S. G. Konstantinov; K. N. Kuklin; S. V. Polosatkin; M. A. Tiunov

• Book ID: 111505352
• Publisher: Allerton Press, Inc.
• Year: 2009
• Tongue: English
• Weight: 786 KB
• Volume: 36
• Category: Article
• ISSN: 1068-3356
• DOI: 10.3103/s1068335609110037