Multiple imprinting in UV-based nanoimprint lithography: related material issues

✍ Scribed by M. Bender; M. Otto; B. Hadam; B. Spangenberg; H. Kurz

• Book ID: 114155405
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 442 KB
• Volume: 61-62
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(02)00470-7