Multiphoton resonance ionization of sputtered neutrals: a novel approach to materials characterization

✍ Scribed by N. Winograd; J.P. Baxter; F.M. Kimock

• Publisher: Elsevier Science
• Year: 1982
• Tongue: English
• Weight: 283 KB
• Volume: 88
• Category: Article
• ISSN: 0009-2614
• DOI: 10.1016/0009-2614(82)85013-6

✦ Synopsis

lonlzntion of neutral atoms sputtered from ion bombarded sohds by multlphoton resonrncc ionuatlon has ken dcmonstratcd for the liust time. The lomzatlon cfficlency IS scvcral orders of magmtudc greater than other post-ionization methods This approach should find a~plicatlons m the charactcnzation of the chemistry and structure of sohd surfaces and in the .

. .

tmc mdysrs of a wide variety of matcnk.

difficulty in this case, however, is that the low duty cycle of the experiment, currently ~3 X 10b6, means that unti bnghter ion-beam sources become available.

maxlmum average primary-ion currents wdl be necessarily low.