✦ LIBER ✦

Multiphoton-ionization / mass spectrometric detection of gallium atom during the trimethylgallium CVD reaction

✍ Scribed by D.W. Squire; C.S. Dulcey; M.C. Lin

Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 554 KB
Volume: 131
Category: Article
ISSN: 0009-2614
DOI: 10.1016/0009-2614(86)80527-9

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✦ Synopsis

Gallium atoms were detected by multiphoton-ionization mass spectrometry in the low-pressure decomposition of trimethylgalbum (TMG ) on heated substrates ( 300-1100 K) . On copper surfaces, an activation energy of 34 & 3 kcal mol-' was found for the production of Ga (ground state). This activation energy is attributed to the desorption of gallium from the surface. GaAs substrates produce similar results at lower temperatures ( 7'6 870 K).