✦ LIBER ✦
Multiphoton-Induced Decomposition of Organometallics as a Route for Production of Doped SnO2 Films
✍ Scribed by Valerian C. Simianu; Jeanne M. Hossenlopp
- Publisher
- John Wiley and Sons
- Year
- 1997
- Tongue
- English
- Weight
- 59 KB
- Volume
- 11
- Category
- Article
- ISSN
- 0268-2605
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✦ Synopsis
A laser-assisted chemical vapor deposition scheme for SnO 2 films has been developed, based on the UV multiphoton dissociation of di (n-butyl) tin diacetate. Doped films were produced by simultaneous photolysis of other inorganic precursors. Films were characterized by UV-visible spectroscopy, room-temperature resistance measurements in the presence of a variety of gas-phase contaminants, and the temperature dependence of film resistance. These preliminary investigations demonstrate the ability to vary detection sensitivity and selectivity by changing the dopant precursor identity.