✦ LIBER ✦
Multilayered hybrid LSI using insulating film deposited by RF sputtering : T. Nishimura, Y. Murayama, K. Dota and H. Matsumaru, Proc. 1970 20th Electronic Components Conf., Washington, 13–15 May (1970), p. 591
- Publisher
- Elsevier Science
- Year
- 1971
- Tongue
- English
- Weight
- 105 KB
- Volume
- 10
- Category
- Article
- ISSN
- 0026-2714
No coin nor oath required. For personal study only.