Multilayer resists with variable layer parameters for submicron lithography

✍ Scribed by V.V. Aristov; V.A. Dmitriyeva; V.A. Kudryashov; K. Pfeiffer; H.-J. Lorkowski

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 323 KB
• Volume: 11
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/0167-9317(90)90169-t