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Multilayer diamond-like carbon coatings

✍ Scribed by Fedoseev, D.V.; Dub, S.N.; Lupich, I.N.; Maslyuk, B.A.

Book ID
122345093
Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
721 KB
Volume
1
Category
Article
ISSN
0925-9635

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Hardness of and stress in tungsten carbide-diamond like carbon (WC-DLC) multilayer coatings sputtered in reactive argon/acetylene plasma have been studied as a function of the bilayer thickness. The multilayer structure has been deposited by a periodic modulation of the reactive acetylene gas flow f