Multilayer deposition of ceramic and metal at room temperature using nanoparticle deposition system (NPDS) and planarization process

✍ Scribed by Chun, Doo-Man; Kim, Chung-Soo; Choi, Jung-Oh; Lee, Gil-Yong; Lee, Caroline Sunyong; Ahn, Sung-Hoon

• Book ID: 121618472
• Publisher: Springer
• Year: 2013
• Tongue: English
• Weight: 650 KB
• Volume: 72
• Category: Article
• ISSN: 0268-3768
• DOI: 10.1007/s00170-013-5327-9