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Multilayer Al2O3—SiO2combination (MASC) films as a partial H2diffusion barrier for use on Ge surfaces

✍ Scribed by Sedgwick, T.O.; Aboaf, J.A.


Book ID
114589483
Publisher
IEEE
Year
1968
Tongue
English
Weight
405 KB
Volume
15
Category
Article
ISSN
0018-9383

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