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Multifunctional interferometric platform for on-chip testing the micromechanical properties of MEMS/MOEMS

✍ Scribed by Gorecki, Christophe

Book ID: 120193109
Publisher: The International Society for Optical Engineering
Year: 2005
Tongue: English
Weight: 536 KB
Volume: 4
Category: Article
ISSN: 1932-5150
DOI: 10.1117/1.2110027

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