✦ LIBER ✦
Multi-way principal component analysis for the endpoint detection of the metal etch process using the whole optical emission spectra
✍ Scribed by Kyounghoon Han; Kun Joo Park; Heeyeop Chae; En Sup Yoon
- Book ID
- 107513841
- Publisher
- Springer US
- Year
- 2008
- Tongue
- English
- Weight
- 466 KB
- Volume
- 25
- Category
- Article
- ISSN
- 0256-1115
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