Multi-wafer growth of highly uniform and high-quality AlGaInP/GaInP structure using high-speed rotating disk metalorganic chemical vapor deposition

✍ Scribed by T. Motoda; M. Kato; K. Kadoiwa; A. Shima; M. Tsugami; T. Sonoda; S. Takamiya; S. Mitsui

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 399 KB
• Volume: 145
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(94)91121-5