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Multi-scale kinetic surface roughening of reactive-sputtered TaN thin films characterized by wavelet transform approach

✍ Scribed by Yang, J.J.; Miao, F.M.; Tang, J.; Yang, Y.Y.; Liao, J.L.; Liu, N.


Book ID
123136548
Publisher
Elsevier Science
Year
2014
Tongue
English
Weight
849 KB
Volume
550
Category
Article
ISSN
0040-6090

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