✦ LIBER ✦
Multi-level relief structures in sol–gel and photoresist fabricated by laser ablation and analyzed with coherence probe microscopy
✍ Scribed by E. Neiss; M. Flury; P. Gérard; L. Mager; J.-L. Rehspringer; A. Fort; P. Montgomery; J. Fontaine; T. Engel; A. Benatmane
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 441 KB
- Volume
- 254
- Category
- Article
- ISSN
- 0169-4332
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