Multi-layer microstructure fabrication by combining bulk silicon micromachining and UV-LIGA technology

✍ Scribed by Xiang-meng Jing; Di Chen; Dong-ming Fang; Chuang Huang; Jing-quan Liu; Xiang Chen

• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 464 KB
• Volume: 38
• Category: Article
• ISSN: 0026-2692
• DOI: 10.1016/j.mejo.2006.09.003