✦ LIBER ✦
Multi-layer alignment control of a large area nano-imprinting stage
✍ Scribed by Hong Jae Yim; Yong Hoon Lee; Sung Hoon Lee; Jay Il Jeong; Si-Hyung Lim
- Publisher
- Springer-Verlag
- Year
- 2009
- Tongue
- English
- Weight
- 801 KB
- Volume
- 23
- Category
- Article
- ISSN
- 1738-494X
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