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✦   LIBER   ✦

MR microscopy of micron scale structures

✍ Scribed by Seung-Cheol Lee; Kiseong Kim; Junghyun Kim; Jeong Han Yi; Soonchil Lee; Chaejoon Cheong


Book ID
103838903
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
829 KB
Volume
27
Category
Article
ISSN
0730-725X

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✦ Synopsis


Magnetic resonance (MR) microscopy of up to 1-5-microm resolutions have been reported previously. The tested phantom structures, however, had widths one order of magnitude bigger than the reported resolutions, e.g., spherical beads or capillary tubes of tens-of-micron diameters or wall thicknesses have been imaged. In this study, we fabricated structures having a few micron widths on a silicon wafer and imaged them using our 1-microm-resolution MR microscopy at 14.1 T. Micron scale width structures were, for the first time, resolved by MR microscopy.


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## Abstract Although bulk silicon is not susceptible to fatigue, micron‐scale silicon is. Several mechanisms have been proposed to explain this surprising behavior although the issue remains contentious. Here we review published fatigue results for micron‐scale thin silicon films and find that in g