MR microscopy of micron scale structures
β Scribed by Seung-Cheol Lee; Kiseong Kim; Junghyun Kim; Jeong Han Yi; Soonchil Lee; Chaejoon Cheong
- Book ID
- 103838903
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 829 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0730-725X
No coin nor oath required. For personal study only.
β¦ Synopsis
Magnetic resonance (MR) microscopy of up to 1-5-microm resolutions have been reported previously. The tested phantom structures, however, had widths one order of magnitude bigger than the reported resolutions, e.g., spherical beads or capillary tubes of tens-of-micron diameters or wall thicknesses have been imaged. In this study, we fabricated structures having a few micron widths on a silicon wafer and imaged them using our 1-microm-resolution MR microscopy at 14.1 T. Micron scale width structures were, for the first time, resolved by MR microscopy.
π SIMILAR VOLUMES
## Abstract Although bulk silicon is not susceptible to fatigue, micronβscale silicon is. Several mechanisms have been proposed to explain this surprising behavior although the issue remains contentious. Here we review published fatigue results for micronβscale thin silicon films and find that in g