MOVPE on patterned substrates: a new fabrication method for nanometer structure devices

✍ Scribed by Yvan D. Galeuchet; Hugo Rothuizen; Peter Roentgen

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 231 KB
• Volume: 15
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/0167-9317(91)90307-y