MOVPE growth of cubic GaN on GaAs using dimethylhydrazine
β Scribed by S. Miyoshi; K. Onabe; N. Ohkouchi; H. Yaguchi; R. Ito; S. Fukatsu; Y. Shiraki
- Book ID
- 103167510
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 325 KB
- Volume
- 124
- Category
- Article
- ISSN
- 0022-0248
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Structural Defects of Cubic InGaN/GaN Heterostructure Grown on GaAs(001) Substrate by MOVPE Y. Taniyasu 1 ) (a), Y. Watanabe (a), D. H. Lim (a), A. W. Jia (a), M. Shimotomai (a), Y. Kato (a), M. Kobayashi (a), A. Yoshikawa (a), and K. Takahashi (b)
InNAs/GaAs multiple-quantum-well samples were grown by MOCVD on (100) n + -GaAs substrates at 500 ΒΊC and 60 Torr using uncracked dimethylhydrazine (DMHy). Quantum well layers were grown using trimethylindium, tertiarybutylarsine, and 95-97.5% of DMHy in the vapor phase, while GaAs buffer, barrier, a