✦ LIBER ✦
Moving mask deep X-ray lithography system with multi stage for 3-D microfabrication
✍ Scribed by O. Tabata; H. You; N. Matsuzuka; T. Yamaji; S. Uemura; I. Dama
- Publisher
- Springer-Verlag
- Year
- 2002
- Tongue
- English
- Weight
- 261 KB
- Volume
- 8
- Category
- Article
- ISSN
- 0946-7076
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