✦ LIBER ✦
Movement measurement with a grating interferometer using sinusoidal phase-modulation
✍ Scribed by Hai Huan; Osami Sasaki; Takamasa Suzuki
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 750 KB
- Volume
- 267
- Category
- Article
- ISSN
- 0030-4018
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