✦ LIBER ✦

Motorola announces first 12” GaAs-on-silicon wafers

Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 519 KB
Volume: 14
Category: Article
ISSN: 0961-1290
DOI: 10.1016/s0961-1290(01)80402-6

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✦ Synopsis

In early September Motorola announced that its Motorola labs had demonstrated the world's first 8" GaAs-on-silicon wafers and (after working with epiwafer manufacturer IQE for over a year to prove manufacturability on mass-production epitaxial deposition tools)

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