Motion Error Compensation Method for Hydrostatic Tables Using Actively Controlled Capillaries

✍ Scribed by Chun Hong Park; Yoon Jin Oh; Joo Ho Hwang; Deug Woo Lee

• Book ID: 105655331
• Publisher: Springer-Verlag
• Year: 2006
• Tongue: English
• Weight: 540 KB
• Volume: 20
• Category: Article
• ISSN: 1738-494X
• DOI: 10.1007/bf02916199