MoSi2 layer formation by ion implantation through metal technique : A. Zambova and I. Nedev. Vacuum 43, 223 (1992)

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 51 KB
• Volume: 32
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(92)90423-i