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Mo/Si multilayers used for the EUV normal incidence solar telescope

โœ Scribed by Zhen Liu; Lin Yang; Bo Chen; Bin Chen; JianLin Cao


Book ID
107363910
Publisher
Science in China Press (SCP)
Year
2011
Tongue
English
Weight
641 KB
Volume
54
Category
Article
ISSN
1672-1799

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Reflective properties of Mo/Si multilaye
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We have fabricated Mo/Si bi-layer and multilayer films under the Xe gas pressures in the range of 0.005-0.1 Pa and the throw distance between the substrate and target longer than 200 mm by using the twocathode superconducting magnetron sputtering apparatus and studied the effect of deposition condit