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Morphological and structural changes in laser CVD of silicon: comparison of theoretical temperature calculations with experimental results

✍ Scribed by D. Milne; J.I.B. Wilson; T.T. Rantala; J. Lenkkeri

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 518 KB
Volume: 43
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(89)90194-3

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