Proton beam writing using the high energ
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F. Menzel; D. Spemann; J. Lenzner; J. Vogt; T. Butz
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Article
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2005
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Elsevier Science
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English
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Proton beam writing (PBW) is a very unique technique capable of the direct creation of three dimensional structures with a very high aspect ratio. Since the high energy ion nanoprobe LIPSION has a very high spatial resolution and is therefore well suited for the creation of structures in the microme