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Monte Carlo simulations of gas flow and heat transfer in vacuum packaged MEMS devices

✍ Scribed by Hongwei Liu; Moran Wang; Jinku Wang; Guoyan Zhang; Huailin Liao; Ru Huang; Xing Zhang

Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
761 KB
Volume
27
Category
Article
ISSN
1359-4311

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## Abstract Direct simulation Monte Carlo (DSMC) method has been widely used to study gaseous flow and heat transfer in micro‐fluidic devices. For flows associated with microelectromechanical systems (MEMS), the heat‐flux‐specified (HFS) boundary condition broadly exists. However, problems with HFS