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Monte Carlo simulations of -doping placement in sub-100 nm implant free InGaAs MOSFETs

✍ Scribed by K. Kalna; Q. Wang; M. Passlack; A. Asenov


Book ID
108215402
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
633 KB
Volume
135
Category
Article
ISSN
0921-5107

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