✦ LIBER ✦

Monte carlo simulation of spatially distributed beams in electron-beam lithography

Book ID: 108389442
Publisher: Elsevier Science
Year: 1976
Tongue: English
Weight: 145 KB
Volume: 26
Category: Article
ISSN: 0042-207X
DOI: 10.1016/s0042-207x(76)80104-2

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