Monte Carlo simulation of ion-beam doping of a silicon-on-sapphire heterostructure with regard to the dislocation structure

✍ Scribed by A. V. Skupov; S. V. Obolenskii

• Book ID: 110202764
• Publisher: Pleiades Publishing
• Year: 2007
• Tongue: English
• Weight: 150 KB
• Volume: 1
• Category: Article
• ISSN: 1027-4510
• DOI: 10.1134/s1027451007020188