✦ LIBER ✦
Monte Carlo simulation of electron transmission through the scattering masks with angular limitation for projection electron lithography
✍ Scribed by Sun, X.; Ding, Z. J.; Pu, Q. R.; Li, H. M.; Wu, Z. Q.; Gu, W. Q.; Peng, K. W.; Wu, G. J.; Zhang, F. A.; Kang, N. K.
- Book ID
- 121089438
- Publisher
- American Institute of Physics
- Year
- 2002
- Tongue
- English
- Weight
- 407 KB
- Volume
- 92
- Category
- Article
- ISSN
- 0021-8979
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