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Monte Carlo calculations of light-ion sputtering as a function of the incident angle

✍ Scribed by L.G. Haggmark; J.P. Biersack

Publisher
Elsevier Science
Year
1980
Tongue
English
Weight
534 KB
Volume
93-94
Category
Article
ISSN
0022-3115

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The statistical-weights Monte Carlo program of Cumpson for the calculation of depth distribution functions (DDF) has been extended in order to allow faster operation by use of a compiled language, C+ + , and the simulation of multilayer structures. The simulation of Auger electrons originating from