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Monte Carlo calculations in X-ray microanalysis of epitaxial layers

✍ Scribed by Popova, Tatiana B. ;Flegontova, Ekaterina Yu. ;Bakaleinikov, Leonid A. ;Zamoryanskaya, Mariya V.

Publisher
Springer-Verlag
Year
2008
Weight
131 KB
Volume
161
Category
Article
ISSN
0344-838X

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## Abstract When thin overlayers on a bulk material have to be analysed by EPMA (electron probe microanalysis) or AES (Auger electron spectroscopy), the signal obtained is enhanced by three factors: (i) back‐scattering, (ii) characteristic x‐rays induced in the bulk by the primary beam and (iii) co