Octree-search Kinetic Monte Carlo
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M.A. Gosรกlvez; Y. Xing; K. Sato; R.M. Nieminen
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Article
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2010
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Elsevier Science
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English
โ 837 KB
We present a Kinetic Monte Carlo (KMC) method based on an octree data representation and search algorithm for the simulation of complex Micro Electro Mechanical Systems (MEMS) structures and, in general, complex, multi-valued surfaces propagating in 3D space. The experimental etch rate distribution