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Monolithically integrated micro flow sensor for lab-on-chip applications

✍ Scribed by L. Schöler; B. Lange; K. Seibel; H. Schäfer; M. Walder; N. Friedrich; D. Ehrhardt; F. Schönfeld; G. Zech; M. Böhm

Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
381 KB
Volume
78-79
Category
Article
ISSN
0167-9317

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## Abstract A 77‐GHz transceiver module has been developed for automotive radar sensors by using an monolithic microwave integrated circuit (MMIC) one‐chip set. An MMIC one‐chip set consists of a transmitter, an eight‐stage low noise amplifier and a mixer. The chip set was fabricated using a 0.15‐μ