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Monolithic silicon bolometers

✍ Scribed by Downey, P. M. ;Jeffries, A. D. ;Meyer, S. S. ;Weiss, R. ;Bachner, F. J. ;Donnelly, J. P. ;Lindley, W. T. ;Mountain, R. W. ;Silversmith, D. J.

Book ID
115332099
Publisher
The Optical Society
Year
1984
Tongue
English
Weight
680 KB
Volume
23
Category
Article
ISSN
1559-128X

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Monolithic silicon bolometers with implanted thermistors, micromachined thermal masses and suspension beams have been developed. These devices are intended for accurate b-decay spectrum measurements in the Milano neutrino mass experiment. By means of a dedicated micromachining fabrication process ve