Monolithic micro-fabrication of Si micro-electro-mechanical structure with GaN light emitting diode

✍ Scribed by R. Ito; M. Wakui; H. Sameshima; F.-R. Hu; K. Hane

• Publisher: Springer-Verlag
• Year: 2010
• Tongue: English
• Weight: 549 KB
• Volume: 16
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-010-1079-8