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Monoethylarsine as a novel replacement for unprecracked arsine source in the chemical beam epitaxial growth of GaAs using trimethylgallium and triethylgallium

✍ Scribed by Seong-ju Park; Jeong-rae Ro; Jae-ki Sim; El-hang Lee


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
423 KB
Volume
136
Category
Article
ISSN
0022-0248

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