✦ LIBER ✦
Monitoring of stress reduction in shallow trench isolation CMOS structures via synchrotron X-ray topography, electrical data and raman spectroscopy
✍ Scribed by P. J. Mcnally; J. W. Curley; M. Bolt; A. Reader; T. Tuomi; R. Rantama¨ki; A. N. Danilewsky; I. DeWolf
- Book ID
- 110271896
- Publisher
- Springer US
- Year
- 1999
- Tongue
- English
- Weight
- 257 KB
- Volume
- 10
- Category
- Article
- ISSN
- 0957-4522
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